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流量測(cè)量主機(jī) |
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型 號(hào):molbox RFM |
品 牌:美國(guó)福祿克FLUKE |
技術(shù)指標(biāo):用戶手冊(cè)、校準(zhǔn)證書、電源線、(2) molbox RFM到molbloc壓線、(1) molbox RFM到molbloc數(shù)據(jù)線、(2)直通壓力快速連接器 |
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自貢流量測(cè)量主機(jī)-molbox RFM-美國(guó)福祿克FLUKE
molbox RFM是一個(gè)輔助單元,,可使用molbloc-L層流和molbloc-S聲速流元件進(jìn)行質(zhì)量流量測(cè)量。
molbloc 流量元件通過(guò)兩個(gè)壓力連接件和一根數(shù)據(jù)線連接到 molbox RFM 上。molbox RFM 從 molbloc EEPROM 讀取校準(zhǔn)數(shù)據(jù),并利用其內(nèi)置的高精度參考?jí)毫鞲衅?(RPT) 測(cè)量 molbloc 的上游壓力和下游壓力。歐姆測(cè)量系統(tǒng)讀取 molbloc 鉑電阻測(cè)溫儀的電阻,,然后由此計(jì)算 molbloc 溫度。利用存儲(chǔ)在 molbox RFM 內(nèi)存中的 molbloc 校準(zhǔn)數(shù)據(jù)、壓力、溫度和氣體屬性,可計(jì)算出通過(guò) molbloc 的氣流流速。對(duì)于 molbloc-L 流量元件,在流量量程 10% FS 以下時(shí),可以選擇微量程選項(xiàng)來(lái)提高流量測(cè)量分辨度和精確度。
molbox RFM 和 molbloc 流量元件應(yīng)用廣泛,適用于需要高精確度測(cè)量低氣流的測(cè)量、測(cè)試和校準(zhǔn)應(yīng)用。對(duì)于主要考慮結(jié)構(gòu)緊湊、量程可調(diào)性高、成本較低的應(yīng)用來(lái)說(shuō),molbox RFM 是理想之選。第二種型號(hào) molbox1+ 針對(duì)的優(yōu)先考慮不確定度的應(yīng)用。要配置質(zhì)量流量校準(zhǔn)系統(tǒng),請(qǐng)查看隨后幾頁(yè),選擇 molbloc 和壓力相關(guān)校準(zhǔn),以便更好的覆蓋您的流量量程和壓力狀況。molstic 安裝系統(tǒng)和 COMPASS® for
molbox 流量校準(zhǔn)軟件可以幫您完善系統(tǒng)。
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結(jié)構(gòu)緊湊
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molbloc-L 覆蓋的流量量程從 1 sccm 到 100 slm,而 molbloc-S 覆蓋的流量上限更是達(dá)到了 5000 slm
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從 20 種不同的氣體中選擇
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利用 100:1 可調(diào)性實(shí)現(xiàn)認(rèn)證的測(cè)量不確定度 ±0.5% 讀數(shù)
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內(nèi)部閥門,可實(shí)現(xiàn)內(nèi)置的清洗、泄漏測(cè)試和自重支持
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包括求和、取平均值、高值/低值及偏差等高級(jí)測(cè)量函數(shù)
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完善的前面板控制以及 RS232 和 IEEE-488 遠(yuǎn)程通信
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利用可由用戶設(shè)置的參考?jí)毫蜏囟葼顟B(tài),測(cè)量質(zhì)量和體積流量
· 流量測(cè)量技術(shù)指標(biāo)
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molbox RFM 可測(cè)量通過(guò) molbloc 流量元件的流量。molbloc-L 的流量量程、可用工作壓力和壓力差,或者 molbloc-S 的流量量程、絕壓量程,,取決于所使用的 molbloc 元件和校準(zhǔn)選項(xiàng)。請(qǐng)參閱 molbloc-L 和 molbloc-S 量程表,了解校準(zhǔn)和量程詳情。
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molbloc-L 量程最高可達(dá) 3E4,,可通過(guò)微量程選項(xiàng)提高在 10% FS 以下時(shí)的分辨率和精確度。對(duì)于 1E5-L molbloc,必須使用微量程選項(xiàng)才能達(dá)到技術(shù)指標(biāo)。
molbox RFM
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molbloc-L(量程從1E1-L到3E4-L)
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molbloc-S(所有量程)
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測(cè)量更新速率
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1秒
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1秒
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范圍
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到molbloc滿刻度,取決于氣體和molbloc壓力
取決于校準(zhǔn)類型(請(qǐng)參閱molbloc-L量程表)
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流量相對(duì)于20 kPa到200 kPa絕壓(3 psia到30 psia)或20 kPa到200 kPa絕壓(7 psia到70 psia)上游
(請(qǐng)參閱molbloc-S量程表)
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分辨率
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0.01% FS
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±0.01%讀數(shù)
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線性
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±0.23%讀數(shù),從10%到100% FS
±0.023% FS,在10% FS以下
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±0.25%讀數(shù)
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重復(fù)性
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±0.1%讀數(shù),從10%到100% FS
±0.01% FS,在10% FS以下
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±0.1%讀數(shù)
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精確度1
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±0.25%讀數(shù),從10%到100% FS
±0.025% FS,在10% FS以下
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±0.3%讀數(shù)
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預(yù)測(cè)的穩(wěn)定度2
(一年期)
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±0.15%讀數(shù),從10%到100% FS
±0.015% FS,在10% FS以下
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讀數(shù)的±0.2%
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測(cè)量不確定度3
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±0.5%讀數(shù),從10%到100% FS
±0.05% FS,在10% FS以下
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±0.5%讀數(shù),從50 kPa到500 kPa,,±0.5%流量@
50 kPa從20 kPa到50 kPa
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具有微量程選項(xiàng)的molbox RFM
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molbloc-L(量程從1E1-L到3E4-L)
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molbloc-L(量程僅僅是1E5)
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測(cè)量更新速率
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1秒
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1秒
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范圍
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從0到molbloc滿刻度,取決于氣體和molbloc壓力
取決于校準(zhǔn)類型(請(qǐng)參閱molbloc-L表格)
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從0到molbloc滿刻度,取決于氣體和molbloc壓力
取決于校準(zhǔn)類型(請(qǐng)參閱molbloc-L表格)
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分辨率
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0.01% FS,,0.001% FS以下
10% FS
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0.01% FS
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線性
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±0.23%讀數(shù),從1%到100% FS;±0.0023% FS,在1% FS以下
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±0.25%讀數(shù),從5%到100% FS
±0.0125% FS,在5% FS以下
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重復(fù)性
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±0.1%讀數(shù),從1%到100% FS
±0.001% FS,在1% FS以下
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±0.2%讀數(shù),從5%到100% FS
±0.01% FS,在5% FS以下
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精確度1
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±0.25%讀數(shù),從1%到100% FS
±0.0025% FS,在1% FS以下
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±0.32%讀數(shù),,從5%到100% FS
±0.016% FS,在5% FS以下
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預(yù)測(cè)的穩(wěn)定度2
(一年期)
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±0.15%讀數(shù),從1%到100% FS
±0.0015% FS,,在1% FS以下
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±0.2%讀數(shù),從5%到100% FS
±0.01% FS,在5% FS以下
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測(cè)量不確定度3
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±0.5%讀數(shù),從1%到100% FS
±0.005% FS,在1% FS以下
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±0.5%讀數(shù),從5%到100% FS
±0.025% FS,在5% FS以下
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· molbloc-S(所有量程)
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除了沒有微量程以外,,其他技術(shù)指標(biāo)與 molbox RFM 相同。只要將 molbox RFM 連接到 molbloc-S 上,就會(huì)禁用微量程傳感器。
· 1 精確度:包含線性度、遲滯和可重復(fù)性。
· 2 預(yù)測(cè)的穩(wěn)定度:典型 molbox RFM 和 molbloc 在典型環(huán)境下使用時(shí)一年內(nèi)從零到范圍值的最大變化情況。由于穩(wěn)定度只能是一種預(yù)測(cè),因此應(yīng)該根據(jù)經(jīng)驗(yàn)建立特定 molbox RFM 的穩(wěn)定度。
· 3 測(cè)量不確定度:molbox RFM 流量指示相對(duì)于通過(guò) molbloc 的流量真值的最大偏差,,包括精確度、穩(wěn)定度和 DHI 校準(zhǔn)標(biāo)準(zhǔn)不確定度。molbloc 的測(cè)量不確定度技術(shù)指標(biāo)僅適用于使用的是 molbloc 校準(zhǔn)過(guò)的氣體的情況。所有 molbloc 都針對(duì) N2 校準(zhǔn)過(guò)。其他氣體的校準(zhǔn)是可選的。并非所有規(guī)格的 molbloc 在所有時(shí)間,對(duì)所有氣體都提供 DHI 校準(zhǔn)功能。請(qǐng)?jiān)谟嗁?gòu)前檢查是否可用。
型號(hào)
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描述
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Molbox
RFM
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molbox RFM參考流量監(jiān)控器
包含:
用戶手冊(cè)、校準(zhǔn)證書、電源線、(2)
molbox RFM到molbloc壓線、(1) molbox RFM到molbloc數(shù)據(jù)線、(2)直通壓力快速連接器
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5141-100
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molbox RFM, molbloc 5E1-L 10
to 100 sccm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E1-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5141-1K
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molbox RFM, molbloc 5E2-L 100
to 1,000 sccm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E2-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5141-10K
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molbox RFM, molbloc 5E3-L 1 to
10 slm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E3-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5141-50K
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molbox RFM, molbloc 3E4-L 5 to
50 slm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
3E4-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5142-1K
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molbox RFM-M, molbloc 5E2-L 10
to 1,000 sccm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E2-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5142-10K
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molbox RFM-M, molbloc 5E3-L
0.1 to 10 slm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E3-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5142-50K
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molbox RFM-M, molbloc 3E4-L
0.5 to 50 slm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
3E4-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5144-50K
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molbox RFM-M, molblocs 5E2-L
and 3E4-L10 sccm to 50 slm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E2-L and 3E4-L laminar flow elements
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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通用配件:
配件
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描述
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MFC-CB控制盒
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MFC-CB控制盒
包括:
(2)MFC/MFM連接線套件
校準(zhǔn)線
電源線
操作與維護(hù)手冊(cè)
校準(zhǔn)報(bào)告
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針對(duì)molbloc/molbo用戶的校準(zhǔn)輔助軟件
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molstic-L安裝系統(tǒng)
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molstic-S安裝系統(tǒng)
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RFM-RMK
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機(jī)架安裝工具
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RFM
02
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微量程
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