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molbox RFM

molbloc-L（量程從1E1-L到3E4-L）

molbloc-S（所有量程）

測量更新速率

1秒

1秒

范圍

到molbloc滿刻度，取決于氣體和molbloc壓力

取決于校準(zhǔn)類型（請參閱molbloc-L量程表）

流量相對于20 kPa到200 kPa絕壓（3 psia到30 psia）或20 kPa到200 kPa絕壓（7 psia到70 psia）上游

（請參閱molbloc-S量程表）

分辨率

0.01% FS

±0.01%讀數(shù)

線性

±0.23%讀數(shù)，從10%到100% FS

±0.023% FS，在10% FS以下

±0.25%讀數(shù)

重復(fù)性

±0.1%讀數(shù)，從10%到100% FS

±0.01% FS，蒸汽流量計.114yb，在10% FS以下

±0.1%讀數(shù)

精確度1

±0.25%讀數(shù)，從10%到100% FS

±0.025% FS，成豐流量計廠家，在10% FS以下

±0.3%讀數(shù)

預(yù)測的穩(wěn)定度2
（一年期）

±0.15%讀數(shù)，從10%到100% FS

±0.015% FS，在10% FS以下

讀數(shù)的±0.2％

測量不確定度3

±0.5%讀數(shù)，從10%到100% FS

±0.05% FS，在10% FS以下

±0.5%讀數(shù)，從50 kPa到500 kPa，±0.5%流量@

50 kPa從20 kPa到50 kPa

具有微量程選項的molbox RFM

molbloc-L（量程從1E1-L到3E4-L）

molbloc-L（量程僅僅是1E5)

測量更新速率

1秒

1秒

范圍

從0到molbloc滿刻度，取決于氣體和molbloc壓力

取決于校準(zhǔn)類型（請參閱molbloc-L表格）

從0到molbloc滿刻度，取決于氣體和molbloc壓力

取決于校準(zhǔn)類型（請參閱molbloc-L表格）

分辨率

0.01% FS，0.001% FS以下

 10% FS

0.01% FS

線性

±0.23%讀數(shù)，沖板流量計，從1%到100% FS；±0.0023% FS，在1% FS以下

±0.25%讀數(shù)，從5%到100% FS

±0.0125% FS，在5% FS以下

重復(fù)性

±0.1%讀數(shù)，從1%到100% FS

±0.001% FS，在1% FS以下

±0.2%讀數(shù)，成豐流量計，從5%到100% FS

±0.01% FS，在5% FS以下

精確度1

±0.25%讀數(shù)，橫河電磁流量計，從1%到100% FS

±0.0025% FS，在1% FS以下

±0.32%讀數(shù)，從5%到100% FS

±0.016% FS，在5% FS以下

預(yù)測的穩(wěn)定度2
（一年期）

±0.15%讀數(shù)，從1%到100% FS

±0.0015% FS，阿牛巴流量計，在1% FS以下

±0.2%讀數(shù)，從5%到100% FS

±0.01% FS，在5% FS以下

測量不確定度3

±0.5%讀數(shù)，從1%到100% FS

±0.005% FS，在1% FS以下

±0.5%讀數(shù)，從5%到100% FS

±0.025% FS，在5% FS以下

型號

描述

Molbox RFM

molbox RFM參考流量監(jiān)控器

包含：

用戶手冊、校準(zhǔn)證書、電源線、(2) molbox RFM到molbloc壓線、(1) molbox RFM到molbloc數(shù)據(jù)線、(2)直通壓力快速連接器

5141-100

molbox RFM, molbloc 5E1-L 10 to 100 sccm

Included:

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E1-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5141-1K

molbox RFM, molbloc 5E2-L 100 to 1,000 sccm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E2-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5141-10K

molbox RFM, molbloc 5E3-L 1 to 10 slm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E3-L laminar flow element

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5141-50K

molbox RFM, molbloc 3E4-L 5 to 50 slm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 3E4-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5142-1K

molbox RFM-M, molbloc 5E2-L 10 to 1,000 sccm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E2-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5142-10K

molbox RFM-M, molbloc 5E3-L 0.1 to 10 slm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E3-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5142-50K

molbox RFM-M, molbloc 3E4-L 0.5 to 50 slm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 3E4-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5144-50K

molbox RFM-M, molblocs 5E2-L and 3E4-L10 sccm to 50 slm

Included:

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E2-L and 3E4-L laminar flow elements

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

配件

描述

MFC-CB控制盒

MFC-CB控制盒

包括：
（2）MFC/MFM連接線套件
校準(zhǔn)線
電源線
操作與維護(hù)手冊
校準(zhǔn)報告

針對molbloc/molbo用戶的校準(zhǔn)輔助軟件

molstic-L安裝系統(tǒng)

molstic-S安裝系統(tǒng)

RFM-RMK

機(jī)架安裝工具

RFM 02

微量程